
tqna49e1 (2010-05) 5
Intended Use
The Capacitance Diaphragm Gauge CDG-500 is intended for
absolute pressure measurement of gases in its respective
pressure range (→ 3).
The gauge can be operated in connection with a VARIAN
AGC-100 Vacuum Gauge Controller, a Varian Turbo AG Rack
Controller, or with another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro-
nics which convert the capacitance into a DC voltage output sig-
nal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademark
VCR
®
Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual
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